High-Purity Fluid Distribution System

Category: Fluid Regulation and Control

Pure Fluid Distribution System centers on fully automatic gas path control and high-integrity welding technology, achieving precise flow regulation and safe isolation of ultra-pure process fluids, ensuring zero contamination and zero leakage in fluid supply for advanced semiconductor and broad semiconductor manufacturing.

Product Parameters

1. Product Series and Selection Range

Product Series	Application Scenario	Gas Type	Valve Group Configuration	Interface Specification
HTP-100 Series	8-inch/12-inch Process Equipment End	Standard Process Gases (Inert/Non-corrosive)	Diaphragm Valve / Check Valve (Standard Configuration)	1/4" ~ 1/2" VCR / SWG
HTP-200 Series	Advanced Process (12-inch) / Core Equipment	Corrosive / Flammable / High-Purity Special Gases	High-Purity Diaphragm Valve / Pneumatic Valve Group (High Corrosion Resistance Configuration)	1/4" ~ 1/2" VCR (EP Grade)
HTP-VMB Series	Facility Side Valve Box / Gas Distribution	Bulk Special Gases / Process Gas Branches	Multi-Channel Integrated Valve Group / Manual Diaphragm Valve	1/2" ~ 1" VCR / Flange

2. Core Performance Specifications (Selection Reference)

Parameter Category	HTP-100 Series (Standard Grade)	HTP-200 Series (High-End Grade)	HTP-VMB Series (Distribution Grade)	Note
External Leak Test	Industry Leading Level (Far below SEMI Standard Requirements)	Extreme Control Level (Exceeds Mainstream Semiconductor Equipment Manufacturer Requirements)	Industry Leading Level	Using helium mass spectrometry leak detection to ensure process and environmental safety
Internal Leak Test	Mainstream Control Level	Precise Control Level	Mainstream Control Level	Ensure zero cross-contamination during multi-gas switching
Pressure Holding Test	50 psi / 12h Pressure Drop Exceeds Industry Standards	50~100 psi / 24h Pressure Drop Far Exceeds Industry Standards	50 psi / 12h Pressure Drop Exceeds Industry Standards	Verify system structural integrity and long-term stability
Particle Control	High Cleanliness (Complies with SEMI Cleanliness Standards)	Top-Level Cleanliness (>0.1μm Particles Almost Zero Detection)	High Cleanliness	Ensure advanced process yield, reduce micro-pollution
Water and Oxygen Content	Optional (Meets Conventional Process Requirements)	Standard ≤10 ppb (H₂O / O₂)	Optional	Applicable for oxygen-sensitive process gases (e.g., HCl, Cl₂)
Helium Leak Test	Optional	Standard (Dynamic Response Verification)	Optional	Simulate structural reliability under pressure shock conditions

3. Safety and Compliance Certifications

Certification Item	Compliance Status	Applicable Series	Description
SEMI S2	Design Compliant (Certification in Progress)	All Series	Includes equipment safety, ergonomics, electrical safety, and environmental requirements. The certification process is being advanced in collaboration with authoritative institutions, and can be coordinated with customers for on-site safety acceptance.
SEMI S6	Design Compliant (Certification in Progress)	All Series	Specialized safety standards for gas equipment ventilation and emission, ensuring effective dispersion of hazardous gas leaks.
FM / Explosion Proof Certification	Customized per Customer Needs	HFT-200 / VMB	For flammable gas applications, explosion-proof structures and certified components can be optionally configured.

4. Selection Configuration List (Customer Filled Items)

To facilitate quick quotation and design, please provide the following information:

Selection Dimension	Options / Description
1. Application Scenario	□ Equipment Side (Tool Side) □ Facility Side (Facility Side) □ Valve Box (VMB)
2. Gas Type	□ Inert Gas □ Flammable Gas □ Corrosive Gas □ High-Purity Special Gas
3. Interface Specification	□ 1/4" VCR □ 1/2" VCR □ Other: __________
4. Valve Group Configuration	□ Manual Diaphragm Valve □ Pneumatic Valve □ Proportional Valve □ Other: __________
5. Cleanliness Level Requirement	□ Standard Cleanliness □ Ultra-High Cleanliness (EP / 10 ppb Water/Oxygen Requirement)
6. Certification Needs	□ SEMI S2/S6 □ FM Certification □ No Special Certification

5. HOFUTECH Core Capabilities

Capability Item	Advantage Description
Design and Integration	Capable of full-scenario custom design from 8-inch mature processes to 12-inch advanced processes, supporting complex valve group topology optimization.
Clean Manufacturing Process	Assembly environment in 10,000-grade or 10-grade clean rooms, combined with automated track welding and high-precision surface treatment processes, ensuring product inner surface Ra ≤ 0.2μm.
Detection Capability	Equipped with high-precision helium mass spectrometry leak detectors, covering the highest industry demand level; has a complete online particle detection and pressure holding test record system.
Delivery and Service	Modular design shortens on-site installation and commissioning cycle; provides fast spare parts response and 7×24h technical support.

Why Choose HOFUTECH?

Full Scenario Process Matching
From 8-inch mature processes to 12-inch advanced processes, product performance synchronizes with leading wafer fabrication plant process nodes, helping customers shorten process introduction cycles.
Perspective Design Driven by Simulation
Based on Jilin University's fluid dynamics simulation technology background, it has complete capabilities from system design, component selection to valve group topology customization. For highly toxic and corrosive gases, it can quickly optimize internal surface treatment and system architecture, avoiding risks at the design stage and reducing trial-and-error costs.
Highly Integrated Modularization
Optimize system layout based on customer needs to achieve compact, space-efficient modular design. Enhance production capacity per unit area within limited clean space, while considering maintainability and future expansion needs.
Full-Process Quality Delivery
HOFUTECH independently controls core process standards. At present, outsourced assembly is handled by strategic partner manufacturers with mature manufacturing, comprehensive quality control, and large-scale capabilities. Technical handover is unified, with full-process supervision and closed-loop acceptance to ensure stable, reliable, and efficient delivery of products.
Localized Agile Service
Quick after-sales response and local spare parts support, minimizing the average equipment repair time (MTTR), ensuring production line continuity, making customers more worry-free.